Products

KNN Lead-free Piezoelectric Thin Films

KNN thin film wafer

KNN thin film wafer

Patterned KNN wafer

Patterned KNN wafer

Application

  • Angular rate sensor for vehicle stability control, rollover detection, and navigation systems
  • MEMS devices (IJ printer heads, HDD head positioner, and MEMS mirror)
  • Energy harvester

Features

  • Films use lead-free biocompatible materials (K, Na, Nb and O)
  • High quality films of (K,Na)NbO3 grown by sputtering
  • High piezoelectric constant: d31≥100pm/V (equivalent to PZT)
  • 6" wafers have good uniformity (≤±5%)
  • High productivity (growth rate ≥ 3.6 μm/hr)
  • Films have self-polarization (poling treatment not required)

Cross-sectional SEM image

Cross-sectional SEM image

XRD pattern

XRD pattern

Products

  • a) KNN thin films with bottom electrode on Si or SOI (mass production available)
  • b) KNN thin films with top and bottom electrode on Si or SOI (mass production available)
  • c) Patterned KNN thin films with patterned top electrode and bottom electrode on Si or SOI
    (less than 10 pieces available)

Cross section of each of products

Cross section of each of products

Specification

  • Actuator (high piezoelectric constant, high breakdown voltage)
  • Sensor (low dielectric constant)
  for actuator for sensor
materials KNN=(K,Na)NbO3
thickness 1~5μm (typical 2~3μm)
wafer diameter 4inch, 6inch
substrate Si, SOI
piezoelectric constant d31=100pm/V d31=80pm/V
dielectric constant 900 350

MEMS: Micro Electro Mechanical Systems
HUD: Head Up Display
HMD: Head Mounted Display

Products